The aim of Microelectronic Engineering is to bring together in one publication the results of international work in the rapidly expanding field of integrated microelectronic. Microelectronic Engineering is an archival, peer-reviewed journal. It publishes full research papers, short communications, and review articles. The scope of this Journal includes materials, methods and designs for microfabrication, processing and inspection for microelectronic and nanoelectronic elements.

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